CN / EN
Product
Product
HIGH PURIFIED GRAPHITE FELT FOR SEMICONUCTOR INDUSTRIY
Made with high-quality imported raw silk, unique high-purity mesh making process, secondary high-temperature sintering purification, and purification furnace treatment.

Category High purified graphite felt for semiconductor Industriy

Online consultation
Product Details


Ultra Pure Hard Composite Felt

Technical Specifications

Technical Specifications

Unit

Measure ambient temperature (℃)

HighPuritySol idification Felt

(S-level)

密度(Volume Density)

g/cmᶟ

20℃

0.15-0.30max

Specific Resistance

Longitudinal

Ω-mm

20℃

2.0*10^-4

Transverse

Ω-mm

20℃

3.5*10^-4

compressive strength(5%deformation)

Longitudinal

Mpa

20℃

1.8

Transverse

Mpa

20℃

1.3

bending strength(5%deformation)

Longitudinal

Mpa

20℃

2.3

Transverse

Mpa

20℃

1.8

Heat shrinkage rate 

10^-6

3000℃

2.5±0.5

Water Absorption(90%relative humidity)

weight%

20℃

<0.1%

Carbon Content

%

25*℃

≥99.9

Ash Content

PPM

25℃

≤5PPM

Specific Heat(average)

W-sec/(g.K)

1400℃

1.72

Sublimation Temperature 

\

3600

Thermal Conductivity

W/(m-K)

1400℃

vacuum:0.25

argon:0.35

Processing Temperature

\

≥2200

Available Size

mm

\

board:≤1600

barrel:Φ≤1600

thickness:20-200

External surface treatment

\

\

1: Paste graphite thin paper

2: Attach carbon fiber cloth

Ultra Pure Soft Felt 

Technical Specifications

Technical Specifications

Unit

Measure ambient temperature (℃)

Ultra high purity graphite soft felt

(S-level)

(HighPurity Graphite felt)

Volume Density

g/cmᶟ

20℃

0.06-0.10max

Specific Resistance

Ω-m

20℃

6-9*10^-3

tensile strength(5%deformation

MPA

25℃

0.10-0.25

Heat shrinkage rate

10^-6

0-3000℃

2.5±0.5

 Water Absorption

weight%

\

<0.1%

90%relative humidity)

Carbon Content

%

25℃

≥99.9

Ash Content

PPM

25℃

≤5PPM

Specific Heat(average

W.sec/(g-K)

1400℃

1.72

Sublimation Temperature

\

3600

Thermal Conductivity

w/(m-K)

1400℃

vacuum:0.14

argon:0.18

Processing Temperature

\

≥2220

Available Size

MM

\

Lengthmm:3000-12000

Widthmm:1000-1400

Thicknessmm :3 -25